plc选型主要是根据所需功能和容量进行选择，并考虑维护的方便性，备件的通用性，是否易于扩展，有无特殊功能要求等。通过比较，我们选用三菱微型可编程控制器的fxon系列。fxon系列是将众多功能凝聚在超小型机壳内的微型可编程控制器。
与f1/f2系列相比，fxon系列安装面积只有f1/f2系列的41%，体积只有37%，并在控制器内备有模拟电位器与run/stop开关等方便功能。通过扩展单元、扩展模块与基本的连接，可自由地选择使用输入输出点数。fxon系列继承了原有系列的固定搭配和灵活性。
(3) plc控制系统的设计
厦门仲鑫达自动化设备有限公司
联系人：李素云
Q Q:1587052687
座 机：0592-5165501
电 话：18965423501
根据工艺提出的条件及控制要求，具体设计思路如下：螺杆冰机有1台循环油泵，运行时，油压的高低通过副线阀来调节。2台稀油泵，油压正常时，1台运行，1台备用并可自动切换。油压低时，2台稀油泵同时启动;当油压差超低时，延时6s跳车。另外，排气温度高，油温度高，北轴承温度高，南轴承温度高，排气压力高，油精滤器压差高，都将引起跳车。但在稀油站油压低，油气压差低，直流电源失压，循环油泵过载，1#、2#稀油泵过载时不跳车，而只发报警信号。要实现上述功能，中间继电器需要数十只，而且接线非常复杂，检修极其困难，可靠性差，而采用plc后接线相当简单，而且可靠性大大提高。其梯形图如图2所示。
TRIConEX 3624 VARIAN E17336980 TUBE, NEW
SOK40-2029 FILAMENT CONDUCTORE, NEW
Gespac ADC-12A GESADC-12A CIRCUIT BOARD, WORKING
Gespac MFI-1 GESMFI-1 BOARD, WORKING
EFECTOR 12-9985-010 KG5007 KG-3008-APKG, WORKING
AMAT 0090-77294 ASSY MEGASONIC, USED
AMAT 0090-00917 ASSY MEGASonIC TANK, LOW LEVEL SWITCH, USED
AMAT 0270-18001 PRESS, LOCATING PIN, LOT 2, NEW
AMAT 3870-03130 VALVE RLF 35PSI 1/4T FLARE PFA RTANG , USED
AMAT 0022-77040 RELEASE END , USED
AMAT 0010-12589 SEAL COVER ASSY, ROLLER ASSY, BRUSH MODULE, 200/300MM , USED
Omron GT1-ID16DS,GT1-OD16DS Digital I/O Input Terminal Module,USED
AMAT 0020-29348 CUP OUTER FEEDTHRU SUPPORT SST RECESSED, NEW
AMAT 0140-26399 CABLE, MFG TANK LVL, DR,WA, NEW
ULVAC B.D-ⅢB HEATER CTRL BOARD, USED
APTECH AP506SM 2P FA TF HF MINI REGULATOR, NEW
AMAT 0020-78984 ADATPTER PLATE, NEW
YASKAWA ELECTRIC CORPORATION JUSP-RA05 RESISTOR UNIT, USED
AMAT 0040-77174 COVER,PLATEN BELT, USED
AMAT 0050-10115 TUBE WELDMENT CAP MAN VCR , USED
FUJI ELECTRIC AG22-L PUSHBUTTON 5AMP 250VAC LAMP28V 1.2W LED24V(SET), USED
AMAT 0021-79492 CKET 2 DI FLOW VALVE DDF3, NEW
AMAT 0090-00915 ASSY MEGASonIC TANK, HH LEVEL SWITCH, USED
MERLIN GERIN NSF150N Compact Circuit Breaker 3 Pole 90 Amp 600Y/347V 90A
MEJIRO PRECISION BMH-250 Light Source 250W metal Halide Lamp , USED
BROOKS SLA7950S1EGG1B2A1 AR 3000 SCCM MASS FLOW ConTROLLER , USED
BROOKS SLA7950S NF3 1500 SCCM MASS FLOW ConTROLLER , USED
BROOKS SLA7950S AR 2000 SCCM MASS FLOW ConTROLLER , USED
AMAT 0140-78150 CABLE, WALKING BEAM MOTOR POWER/ENCOD, WORKING
BROOKS SLA7950S1EGG1B2A1 AR 2000 SCCM MASS FLOW ConTROLLER , USED
BROOKS SLA7950S WF6 5 SCCM MASS FLOW ConTROLLER , USED
BROOKS SLA7950S DCS 500 SCCM MASS FLOW ConTROLLER , USED
FESTO PC9905 Rev A , USED
Heidenhain IBV 660B 2-Axis Interpolation Digitalizer , USED
KEYENCE VT-5MB OPERATOR PANEL , USED
MKS 141A-22763 Vaccum Switch, Pressure Gauge 10 TORR , USED
AMAT 0140-24472 HARNESS ASSY, E-CHAIN PNE, NEW
AMAT 0140-24168 HA,ADPTER SYS MDL TO GP, NEW
HITACHI ZV811 VME-J1-MB5, USED
ORIENTAL MOTOR ASM46AK DC 1.95V 1.3A , USED
AMAT 0140-77044 CABLE, MNFRM BKHD ROBOT X, USED
AMAT 0040-46173 BEARING HOUSING, base ASSY 200MM PAD CON, NEW
AMAT 1270-00748 SW FLOW FLUID, 2LPM SPST NO, 1/2IN FLARE, NEW
AMAT 1270-00688 SW FLOW FLUID 800CC DECR 3/8FNPT SPST-N, NEW
E105G-001 PCB, WORKING
AMAT 0090-00515 ASSY, PRESSURE MONITOR, DIW INLET, MESA , USED
AMAT 3760-00022 SLIDE CROSS RLR TABLE SST 1.969TRVL 1.18X.47X3.15 , USED
SMC PSE301 2-Color Pressure Sensor Controller w/ Digital Display,USED
CKD FSM-H-D RAPIFLOW SENSOR,USED
FUJIKIN FUBV-115D VALVE NO. 100413, USED
SMC D-A73 Reed Switch 24VDC 100VAC,USED
NSK EP0810AF8-05 NSK DRIVER, MEGATORQUE , USED
FUJIKIN FPR-71RS1-9.52-2-PA-BR VALVE DIAPHRAGM AIR OPERATED C. No. 083052
FUJIKIN FPR-71-6.35-2-PA-BR VALVE NO. 040576, USED
FUJIKIN FUBFN-71-6.35-DFZ Pneumatic 1/2" VCR Diaphragm Air Valve SST No. 006148
FUJIKIN FP-71RS1-6.35-PA INCORPORATED TYPE N.O No. 076533,USED
AMAT 0870-01010 DRVR SERVOPACK AC SGD 100W 200V FOR SPE , NEW
AMAT 0200-01041 COVER RING, 8" BESC, AL ARC-SPRAY, Refurbished
FUJIKIN FPR-71-9.52-2-PA-BR INCORPORATED. No. 040579 , USED
MKS 631A13TBEH2 TYPE 631 BARATRON PRESSURE TRANSDUCER 399.96 Pa , USED
AMAT 0040-40785 COVER CROSS COVER UNIVERSAL, USED
AMAT 0040-45853 & 0090-77179 TOOL GRIPPER AIR CHUCK, SINGLE ACTING N/, USED
AMAT 0040-45850 & 0090-77183 TOOL GRIPPER AIR CHUCK, SINGLE ACTING N/, USED
AMAT 0040-45853 & 0090-77181 TOOL GRIPPER AIR CHUCK, SINGLE ACTING N/, USED
SMC CDQ2B12-20D Cylinder Max. Press:1.0MPA,USED
SMC CDQ2D16-15DM-A73 Cylinder Max. Press:1.0MPA,USED
NK TECHNOLOGIES ATR0-420-24L-FT CURRENT TRANSDUCER,USED
AMAT 0040-99581 PLUG, base SST HEATER 300MM TXZ , USED
AMAT 0020-83945 PLUG, ROD SST HEATER 300MM TXZ , USED
AMAT 0150-77097 50FT, SECS/GEM EXTENSION , USED
AMAT 0140-78020 HARNESS, MOTOR ENCODER, BRUSH , USED
SMC CXSM10-60-Y59AL Dual Rod Cylinder,USED
SMC CXSM15-60-Y59AL Dual Rod Cylinder,USED
FUJIKIN FBSDAL-RS20-6.35UGF-2B5-DVD VALVES BLOCK C. No. 095901 , USED
FUJIKIN FBSDAL-6.35UGF-2B5-DVD VALVES BLOCK C. No. 095947 , USED
FUJIKIN FPR-71RS1-9.52-PA VALVE DIAPHRAGM AIR OPERATED C. No. 076539
CKD EVT-T9DARFL334590,EVT-T9DARFL318650 Slave Station,USED
AMAT 0020-47048 BRACKET, COUPLING MT, 6-PORT HIGH SPEED SPINDLE, REFLEXION
CKD EVT-T9DAR,EVT100-1-E2-3 Slave Station,USED
AMAT 0020-47330 CLAMP, DRIVE, 6-PORT SPINDLE, LK REFLEXION , USED
CKD STR2-M-16-60 Pneumatic AIR CYLINDER,USED
AMAT 0020-41627 BRACKET, CLAMP, 6-PORT HIGH-SPEED SPINDLE, 300MM , USED
Surpass P300P-P Teflon Check Valve,USED
MANOSTAR FR51 PRESSURE GAUGE,USED
AMAT 0190-11332 SPINDLE MOTOR 300MM LK REFLEXION D101B-93-1210-014 , USED
NOR-CAL PRODUCTS ALUMINUM CLAMPS,USED
AMAT 0010-15734 FINGER ASSY, PEEK, LONG W / CLAMP , USED
AMAT 0010-15735 FINGER ASSY, PEEK SHORT W / CLAMP , USED
FUJIKIN FBSDAL-RS2-6.35UGF-1B3-DVD VALVES BLOCK C. No. 087274 , USED
SMC Pneumatic Pressure Gauge 0-0.7 MPa,USED
AMAT 3380-00025 SMC INR-244-646A Thermo Heat Exchanger , USED
NKS Pressure Gauge 0-1 MPA,USED
AMAT 0020-27719 CLAMP RING 8 JMF HOT AL 6 PADS HTHU TI , NEW
AMAT 0020-27945 CLAMP RING, 6 INCH, JMF, HOT AL HTHU, 6 , NEW
AMAT 0090-77037 ASSY, ConTROLLER SIGNAL TOWER , USED
FUJIKIN FUDDFL-71-6.35-NL-UP Manual Valve C. No. 021329 , USED
FUJIKIN FUBFL-71-9.52-2-PA-BR SWITCH BELLOWS C. No. 042933 , USED
CKD 3PA110-C2 Solenoid Valve,USED
SMC SYJA722-01 Solenoid Valve Air Pilot SYJ700 3 Port 1/8 NPT Pneumatic N.O,USED
FUJIKIN FBSDAL-6.35UGF-1B3-DVD VALVES BLOCK C. No. 084124 , USED
Advance 2240-V92CBI-01 Chemical valve, USED
Advance 2240-CBIZ3AB5-02 Chemical valve, USED
CKD GAMDZ0-X0324 Valve,USED
LAM Research 715-140126-001 MIDDLE BAFFLE , NEW
LAM Research 715-140124-001 UPPER BAFFLE , NEW
TOKYO ELECTRON 1D10-101475-11 BAFFLE PLATE UNITY-II DRM 200mm , NEW
SMC LVDA10-01-C-X18 single Valve,USED
FUJIKIN FUDDFL-21-6.35UGF-APD DIAPHRAGM OPEN/CLOSE VALVE 070930, USED
AMAT 0090-77135 SLURRY PUMP MOTOR , USED
CKD AMDZ2-6-2 single Valve,USED
SMC LLD1B-03-01-X14,LVD10-33A-X16 ×2,LVD11-33A-X16, VALVE, USED
FUJIKIN FPR-UDDFA-21-6.35UGF-A GAS VALVE O.P 0.39~0.59MPa TYPE N.C.070866, USED
PARKER 45600786PA VERIFLO VALVE SQMICRO130E602PUPG6122 , USED
MYKROLIS WG3SS1WW2 SURFACE MOUNT FILTER , USED
AMAT 0240-42491 ASSEMBLY, CROSS WHEEL FOR MIRRA CMP , USED
SMC EX122-SDN1-X26 Valves Serial Unit Devicenet Interface,USED
SMC LLD2B-02-S07-X7R,LVD20B-S07-X20, LVD20B-S07-X24 VALVE, USED
PARKER 45600574PA VERIFLO VALVE SQMICROHF502PUPG6010 , USED
SMC LLD2B-S07-X7L,LVD20B-S07-X19, LVD20B-S07-X24 VALVE, USED
SMC LVD20-S07-X13A VALVE, USED
TEM TECH HYPFU-WD420 SENSOR RANGE -0.1 ~ 05MPa , USED
SMC LVD20-T07-X1 VALVE, USED
SMC LVA21-02-C-X26 VALVE, USED
SMC LVD21-S07-X13A VALVE, USED
SMC LVA20-02-C-X26 VALVE, USED
AMAT 0020-25730 SHIELD UPPER G12 DBL KNEE SST, NEW
SMCLLD2B-04-T13-X11,LVD20B-T07-X15 ×4, VALVE, USED
SMC LLD3B-07-T13-X33,LVD30B-T11-X6 ×6,LVD20B-T07-X15, VALVE, USED
SMC LLD3B-04-T13-X32,LVD30B-T11-1-X6 ×4, VALVE, USED
SMC LLD3B-04-T13-X29R,LVD30B-T11-X6 ×4, VALVE, USED
SMC LLD38-04-T13-X36,LVD308-T11-X6 ×4, VALVE, USED
HORIBA STEC SEC-F730M A1 MASS FLOW ConTROLLER NH3 GAS 2SLM , USED
HORIBA STEC SEC-F740BM A1 MASS FLOW ConTROLLER N2 GAS 10SLM , USED
SMC SY3293-5MZ SOLENOID VALVE,USED
HORIBA STEC SEC-F750BM A1 MASS FLOW ConTROLLER N2 GAS 50SLM , USED
HORIBA STEC SEC-F740BM A1 MASS FLOW ConTROLLER HF GAS 5SLM , USED
HORIBA STEC SEC-F740BM A1 MASS FLOW ConTROLLER F2 GAS 5SLM , USED
HORIBA STEC SEC-F730M A1 MASS FLOW ConTROLLER Si H2 CI2 GAS 200SCCM , USED
HORIBA STEC SEF-G111AM MASS FLOW ConTROLLER NH3 2SLM , USED
HORIBA STEC SEF-G111AM MASS FLOW ConTROLLER si H2 Cl2 GAS 200SCCM , USED
HORIBA STEC SEC-G111AMC MASS FLOW ConTROLLER N2 GAS 500SCCM , USED
AMAT 0140-75169 HEAD ROT 1&2, DVR 2&3 BKPLN BD, USED
AMAT 0140-75170 HEAD ROT 3&4 MP3-DVR 4&5, USED
AMAT 0090-00915 ASSY MEGASonIC TANK, HH LEVEL SWITCH, USED
AMAT 0020-78947 RR MANIFOLD, NEW
AMAT 0090-00963 CABLE ASSY PRESS TRANSDUCER -14.7-15, ZO, WORKING
AMAT 0090-00961 CABLE ASSY PRESS TRANSDUCER -14.7 - 15, WORKING
AMAT 0050-09057 Baratron 1/2 inch VCR Tube Weldment Cap Man , USED
AMAT 0090-09243 COIL, MAGNET FRONT/BACK , USED
RORZE RAE-03450-A6 ROBOT BLADE , USED
VAT 01032-KE01-0001/0957 VACUUM GATE VALVE A-568543,USED
FUJI ELECTRIC SC-N11-300 3 POLE ConTACTOR 24 DC SC3ABAA , USED
AMAT 0650-01095 CMPTR SWITCH BOX 2-TO-1 BLACKBOX SWD12A , NEW
AMAT 0020-09031 INSULATING WASHER , USED
Nor-Cal Products 050127-21 Pneumatic Angle Valve , NEW
AMAT 0190-11452 APPLIED BRAND PCG GAUGE , USED
AMAT 0150-29692 CABLE ASSY, E2S PORT 12 T, NEW
AMAT 0140-23593 HARN ASSY, CHX RS-486 1FT, NEW
AMAT 0150-25628 CABLE ASSY, SOURCE MATCH, NEW
AMAT 0090-03894 SENSOR ASSY IPA LEL MonIT , NEW
AMAT 0140-77149 REV : A, NEW
AMAT 0140-18549 HARNESS ASSY XFER PRESS T , NEW
AMAT 0140-75036 HARNESS ASSY WAFER ORIENT, NEW
AMAT 0140-11685 H/A, AC SUPPLY, SHELF C VFD, 5.X FI, NEW
THERMO SCIENTIFIC D4511 Barnstead B-Pure Water Filter, NEW
Hitachi 573-7015 SHCPU Card, USED
AMAT 3030-05714 Tylan FC-2950 Mass Flow Controller,WORKING
LAM RESEARCH 715-443202-001 RING, CPLG, ESC, JEIDA, 8", WORKING
TEL 2910-290041-12 8′ TWEEZER(CERAMIC ARM), NEW
AMAT 0015-77191 PULLEY FOLLOWER INPUT SHUTTLE, NEW, LOT 2
AMAT 0020-79186 OUTER BEARING SPACER PAD COND, NEW
AMAT 0100-77033 PCB ASSEMBLY, WAFER LOSS BOARD, WORKING
AMAT 0140-77382 CABLE MAINframe BLKHD-PC/HCLU PLATEN PUM, USED
AMAT 0140-78455 CBL, ASSY, PC/HCLU, PLTN PUMP SNSR, FLUI, WORKING
AMAT 0140-77421 CBL,CAROUSEL HOME SENSOR, USED
AMAT 0140-78116 CABLE FLOW/PRESSURE SWITCHES LOWER ELEC, MEGASONIC, WORKING
AMAT 0140-04838, WORKING
AMAT 3800-00375 HICV-045FVI5-131Y143 Advance Teflon Pressure Regulator, NEW
AMAT 0090-77297 PP PRESSURE TRANSDUCER -14.7 TO 10, WORKING
FURON 1109820, VALVE, RETROFIT KIT UPRP-8/48/6-P, NEW
CYBEX 500-103 PCEXPANDER Plus 4 TRANSMITTER, WORKING, TESTED
AMAT 0090-77153 BRUSH BAR SWITCH RIGHT SENSOR, NEW
AMAT 0270-00734 HANDLE THROTTLE VALVE HDP-CVD, ULTIMA, NEW
AMAT 0015-13028 MOD INTERIOR TRIM 54 POSITION CB, NEW
AMAT 0140-77030 CNTRL BKHD PLATEN ENCODER J12, USED
AMAT 0090-77067 IT PRESSURE TRANSDUCER , NEW
Panasonic MSDA041A2A14 AC SERVO DRIVER 115V 6.6A, USED
FUJI SEIKI 1090961 THROTTLE VALVE , USED
AMAT 0020-83945 PLUG, ROD SST HEATER 300MM TXZ , USED
AMAT 1200-01067 RELAY CNTOR ABB 300 Amp Contactor EH160 , USED
WESTINGHOUSE C JD25K Series C Circuit Breaker 250 Amp Max. 3pole , USED
AMAT 3870-02323 VALVE PNEU INLINE 1" NW25 VIT-SEAL , NEW
AMAT 0150-24131 CABLE ASSY, AMAT KVM TO U, NEW
AMAT 0040-51942 COVER, CENTRAL DIST. GAS FEED, 300MM DPN , NEW
AMAT 0140-19572 HARNESS ASSY, FI & WET ROBOT, NEW
AMAT 0150-12889 C/A TGV MOTOR DRIVER TO B , NEW
AMAT 0140-24765 HARN ASSY, LOWER LAMP MOD, NEW
AMAT 0140-18997 HARNESS AMAT KVM TO, NEW
AMAT 0140-11272 HARNESS ASSEMBLY , NEW
AMAT 0150-12856 CABLE ASSY, 75FT RS232 OZ, NEW
AMAT 0050-82774 HOSE ASSEMBLY COOLIING WATER RETURN OZONE SACVD PROD, NEW
AMAT 0227-36763 KIT C/A CERT OF COMP EMC , NEW
Hitachi 573-7018 SHAIO Card, USED
Hitachi 573-7024 SHPMC2 Card, USED
Hitachi ZVL808-0 PCP, USED
AMAT 0040-48880 MEMBRANE CLAMP, 300MM TITAN PROFILER , USED
SONY DPR-LS24 S3101 EP-GW 1-680-922-11 , USED
Delta Tau PMAC2-PC Assy NO 602404-106 , USED
AMAT 0090-77279 HARNESS, SWITCH, LQ. LEVEL HI, BRUSH LDM, WORKING
AMAT 0090-77282 HARNESS, SWITCH, LEAK DETECT, BRUSH LDM, WORKING
AMAT 0090-77280 HARNESS, SWITCH, LIQ. LEVEL LO, BRUSH LD, WORKING
AMAT 0140-02781 CABLE SYSTEM INTERLOCK SYSTEM, 300MM 36, WORKING
AMAT 0090-00962 CABLE ASSY, PRESS TRANSDUCER -14.7-15, Z, USED
AMAT 0140-77154 CABLE ROBOT, ENCL, MNFRM-ROBOT BLKHD, USED
AMAT 0140-77419 CABLE, LOWER PNEUMATIC, NEW
AMAT 0140-11364 HARNESS ASSY , MAG ROT MTR, NEW
AMAT 0020-26721 MOUNT, BALL TRANSFER, FI OUTRIGGR , NEW
AMAT 0150-13155 CABLE POWER 5 KVA XFMR TO, NEW
AMAT 3870-02057 3-WAY TEFLON VALVE, SLURRY (3870-02057), NEW
AMAT 0100-77037 ASSY, INTERLOCK PCB #1, USED
AMAT 0090-77062 dro DOWN SENSOR, WORKING
AMAT 0150-04166 CBL 50' REMOTE START/STOP CONT MF-BLKHD, WORKING
AMAT 0140-05027 CABLE ROBOT, ENCL MNFRM-ROBOT BLKHD, WORKING
VEXTA PMM33B-HG50 5-Phase Step Motor with D4CL-5.0 , USED
AMAT 0150-12231 CABLE ASSY INTERConNECT R, NEW
GE Fanuc HE693STP311E INDEXER STEPPER MOTOR THREE AXIS , USED
NATIonAL BV-RB04TSY FAN-FILTER ConTROLLER , USED
MDC 996035-2000 Stainless Steel Manual 2 3/4 Conflat to 2 3/4 Conflat Valve
AMAT 0190-33934 IV-2410AV-02H-N Injection Valve, WORKING
GE Fanuc IC693DSM302-AF MOTION MATE DSM300 2AXES , USED
AMAT 0020-22499 SHIELD, COLLIMATOR LOWER 8 , REFURBISHED
VeriFlow 45700048 Stainless Steel 316L Pneumatic Valves, VCR to VCR 125 PSI Max
Celerity UPC-8130 N2 500 SCCM MASS FLOW ConTROLLER , USED
AMAT 0050-09380 WELDMENT DIVERTED , USED
AMAT 0100-11002 PCB ASSEMBLY DIGITAL I/O , USED
